Development of a solution spraying system for the synthesis of thin-film structures by the spray-pyrolysis method 

Timur O. Zinchenko, Postgraduate student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: Scar0243@gmail.com
Ekaterina A. Pecherskaya, Doctor of engineering sciences, associate professor, head of the sub-department of information and measuring technology and metrology, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: pea1@list.ru
Vladislav I. Kondrashin, Applicant, Penza State University (40 Krasnaya street, Penza, Russia); Paradigma LLC, director-general, head of the Center for Robotics and Programming (office 316, 51 Kirova street, Penza, Russia), E-mail: vlad_kondrashin@mail.ru
Maksim V. Gresik, Student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: pwlove00@gmail.com
Andrey A. Maksov, Student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: maksov.01@mail.ru
Angelina E. Zhurina, Master’s degree student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: gelya.zhurina@mail.ru 

66.065 

10.21685/2072-3059-2021-4-10 

Background. At the present stage of science and technology, one of the leading directions is the development of technological processes for the manufacture of nano- and microelectronic devices. Thin-film structures, on which most modern electronic components are based, are a promising area for the development of this direction. One of the key places is occupied by transparent conducting oxides. Traditional methods of their preparation have a number of disadvantages, in connection with which it was decided to use the method of spray pyrolysis or aerosol pyrolysis. One of the main aspects is the choice of a sprayer, since the quality of the resulting coatings depends on its type. In terms of price - quality, a pneumatic spray was selected. Materials and methods. The study presents the types of atomizers, the development of a pneumatic atomizer, the main stages of obtaining films and technological modes of the synthesis of transparent conducting oxides based on the spray pyrolysis method. Results. The following main stages of the deposition of transparent conducting oxides are presented: sputtering, the movement of solution droplets by an air stream to the hot substrate, and pyrolytic decomposition of the precursor. Liquid spraying methods: ultrasonic, hydraulic, pneumatic, electrostatic, mechanical spraying. The parts of the atomizer presented in this work are mainly made of fluoroplastic, namely the outer tube, nozzle, plug and inner tube. Also includes a stainless steel needle. The hole in the nozzle has a diameter of 1 mm. Conclusions. Based on the analysis of the types of aerosol spraying and the aim of synthesizing coatings with specified quality parameters, the choice of the type of atomizer was carried out, and the technological modes for obtaining transparent conductive oxides based on tin dioxide were determined. 

spray pyrolysis, transparent conductive oxide, technological modes, types of atomizers, pneumatic spraying 

1. Zinchenko T.O., Pecherskaya E.A. Analysis of methods for obtaining transparent conductive coatings. Informatsionnye tekhnologii v nauke i obrazovanii. Problemy i perspektivy: sb. nauch. st. Vseros. mezhvuz. nauch.-prakt. konf. = Information technologies in science and education. Problems and prospects: proceedings of the All-Russian intercollegiate scientific and practical conference. Penza, 2018:258–260. (In Russ.)
2. Gümü C., Ozkendir O.M., Kavak H., Ufuktepe Y. Structural and optical properties of zinc oxide thin films prepared by spray pyrolysis method. Journal of optoelectronics and advanced materials. 2006;8:299–303.
3. Park S.H., Son Y.C., Willis W.S., Suib S.L. [et al.]. Tin oxide films made by physical vapor deposition – thermal oxidation and spray pyrolysis. Chemistry of Materials. 1998;10:2389–2398.
4. Gourari H., Lumbreras M., van Landschoot R., Schoonman J. Elaboration and characterization of SnO2–Mn2O3 thin layers prepared by electrostatic spray deposition. Sensors and Actuators B. 1998;47:189–193.
5. Racheva T.M., Stambolova I.D., Donchev T. Humidity–sensitive characteristics of SnO2–Fe2O3 thin films prepared by spray pyrolysis. Journal of Materials Science. 1994;29:281–284.
6. Aranovich J., Ortiz A., Bube R.H. Optical and electrical properties of ZnO films prepared by spray pyrolysis for solar cell applications. Journal of Vacuum Science and Technology. 1979;16:994–1003.
7. Okuya M., Kaneko S., Hiroshima K., Yagi I., Murakami K. Low temperature deposition of SnO2 thin films as transparent electrodes by spray pyrolysis of tetrare butyltin (IV). Journal of the European Ceramic Society. 2001;21:2099–2102.
8. Stelzer N.H.J., Schoonman J. Synthesis of terbia–doped yttria–stabilized zirconia thin films by electrostatic spray deposition (ESD). Journal of Materials Synthesis and Processing. 1996;4:429–438.
9. Ruiz H., Vesteghem H., Di Giampaolo A.R., Lira J. Zirconia coatings by spray pyrolysis. Surface and Coatings Technology. 1997;89:77–81.
10. Setoguchi T., Sawano M., Eguchi K., Arai H. Application of the stabilized zirconia thin film prepared by spray pyrolysis method to SOFC. Solid State Ionics. 1990;40–41:502–505.
11. Surikov V.T. Pneumatic cross-flow nebulizers for inductively coupled plasma spectrometry. Analitika i kontrol' = Analytics and control. 2010;14(3):108−156. (In Russ.)
12. Patil G.E., Kajale D.D., Chavan D.N., Pawar N.K. [et al.]. Synthesis, characterization and gas sensing performance of SnO2 thin films prepared by spray pyrolysis. Bull. Mater. Sci. 2011;34(1):1–9.
13. Raksha S.V., Kondrashin V.I., Pecherskaya E.A., Nikolaev K.O. Functional materials for dye-sensitized solar cells. Zhurnal nano- i elektronnoy fiziki = Journal of nano- and electronic Physics. 2015;7(4):04062.
14. Raksha S.V., Kondrashin V.I., Pecherskaya E.A., Nikolaev K.O. Functional materials for dye-sensitized solar cells. Fizika i tekhnologiya nanomaterialov i struktur: sb. nauch. st. 2-y Mezhdunar. nauch.-prakt. konf. = Physics and technology of nanomaterials and structures: proceedings of the 2nd International scientific and practical conference. Kursk, 2015:143–146. (In Russ.)
15. Zinchenko T., Pecherskaya E., Artamonov D. The properties study of transparent conductive oxides (tco) of tin dioxide (ato) doped by antimony obtained by spray pyrolysis. AIMS Materials Science. 2019;6(2):276–287.
16. Pecherskaya E.A., Zinchenko T.O., Kravtsov A.N. [et al.]. Development of spray pyrolysis technology for the synthesis of transparent conductive coatings based on tin dioxide. Izvestiya vysshikh uchebnykh zavedeniy. Povolzhskiy region. Tekhnicheskie nauki = University proceedings. Volga region. Engineering sciences. 2020;(4):92–103. (In Russ.)